Polymerization protective liner for reactive ion etch in patterning

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12237175
APP PUB NO 20220238349A1
SERIAL NO

17596189

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Abstract

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Methods of patterning vias and trenches using a polymerization protective liner after forming a lower patterned mask layer used for etching trenches on a semiconductor substrate prior to forming an upper patterned mask layer used for etching vias are provided. Methods involve forming a polymerization protective liner either nonconformally or conformally using silicon tetrachloride and methane polymerization. Polymerization protective liners may be sacrificial.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION; INTERNATIONAL BUSINESS MACHINE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Friddle, Phillip Clifton Park, US 2 3
Goss, Michael Holliston, US 12 277
Metzler, Dominik Saratoga Springs, US 27 481
Mignot, Yann Slingerlands, US 128 357
Nagabhirava, Bhaskar Cohoes, US 9 44

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