MEMS mirror system with slow light beam deflection using fast resonant oscillations about at least two resonant axes

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12235439
APP PUB NO 20230067823A1
SERIAL NO

17412708

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Abstract

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A light beam deflection system is configured to transmit a light beam at an output deflection angle that changes over time. The system includes a first resonant structure configured to oscillate about a first rotation axis at first resonant frequency; a second resonant structure configured to oscillate about a second rotation axis at a second resonant frequency, where the first rotation axis is parallel to the second rotation axis, and where the first resonant frequency and the second resonant frequency are different and define a predetermined frequency difference; and a driver circuit configured to generate a first driving signal to drive the first resonant structure while further generating a second driving signal to drive the second resonant structure such that the output deflection angle of the light beam oscillates according to a beat pattern of a beat wave whose extrema amplitudes are modulated and defined by a periodic envelope.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kirillov, Boris Judendorf-Straßenge, AT 37 96
Sladkov, Maksym Graz, AT 7 9

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