Method for sealing cavities using membranes

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United States of America

PATENT NO 12234144
APP PUB NO 20220298007A1
SERIAL NO

17637040

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Abstract

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A method for sealing cavities using membranes, the method including a) forming cavities arranged in a matrix, of a depth p, a characteristic dimension a, and spaced apart by a spacing b; and b) forming membranes, sealing the cavities, by transferring a sealing film. The method further includes a step a1), executed before step b), of forming a first contour on the front face and/or on the sealing face, the first contour comprising a first trench having a width L and a first depth p1, the formation of the first contour being executed such that after step b) the cavities are circumscribed by the first contour, said first contour being at a distance G from the cavities between one-fifth of b and five b.

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Patent Owner(s)

  • COMMISSARIAT A L' ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES; SOITEC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Benaissa, Lamine Grenoble, FR 30 77
Coutier, Caroline Grenoble, FR 7 12
Gaudin, Gweltaz Crolles, FR 35 221
Ghyselen, Bruno Seyssinet-Pariset, FR 139 2278
Salvetat, Thierry Grenoble, FR 6 5

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