Outgassing material coated cavity for a micro-electro mechanical system device and methods for forming the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12234141
APP PUB NO 20230365398A1
SERIAL NO

18358175

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Abstract

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A MEMS support structure and a cap structure are provided. At least one vertically-extending trench is formed into the MEMS support structure or a portion of the cap structure. A vertically-extending outgassing material portion having a surface that is physically exposed to a respective vertically-extending cavity is formed in each of the at least one vertically-extending trench. A matrix material layer is attached to the MEMS support structure. A movable element laterally confined within a matrix layer is formed by patterning the matrix material layer. The matrix layer is bonded to the cap structure. A sealed chamber containing the movable element is formed. Each vertically-extending outgassing material portion has a surface that is physically exposed to the sealed chamber, and outgases a gas to increase the pressure in the sealed chamber.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
An, Tai-Bang New Taipei, TW 4 1
Chang, Kuei-Sung Kaohsiung, TW 97 622
Cheng, Chun-Wen Zhubei, TW 259 3778
Lin, Hung-Hua Taipei, TW 51 387

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