Laser amplification device and extreme ultraviolet light generation apparatus
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United States of America
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Feb 18, 2025
Grant Date -
Feb 16, 2023
app pub date -
Mar 16, 2020
filing date -
Mar 16, 2020
priority date (Note) -
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Abstract
A laser amplification device includes a laser oscillator that includes a first laser active medium including a mixed gas containing carbon dioxide gas and emits pulsed laser light with the full width at half maximum of between 15 ns to 200 ns, and a laser amplifier that includes a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened to pulsed laser light with the full width at half maximum of between 5 ns and 30 ns to be output.
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