Light irradiation type heat treatment apparatus
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Feb 18, 2025
Grant Date -
Feb 17, 2022
app pub date -
Nov 1, 2021
filing date -
Nov 1, 2021
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A light diffusion plate made of quartz and provided with a plurality of recessed spherical surfaces is placed on an upper chamber window so as to be in opposed relation to a central portion of a semiconductor wafer. Flashes of light emitted from flash lamps and passing by the side of the light diffusion plate impinge upon a peripheral portion of the semiconductor wafer. On the other hand, flashes of light emitted from the flash lamps and entering the light diffusion plate are diverged by the recessed spherical surfaces. Part of the light entering the light diffusion plate is diffused toward the peripheral portion of the semiconductor wafer. As a result, this increases the amount of light impinging upon the peripheral portion of the semiconductor wafer, and decreases the amount of light impinging upon the central portion of the semiconductor wafer.
First Claim
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International Classification(s)
- 2021 Application Filing Year
- H01L Class
- 28775 Applications Filed
- 15216 Patents Issued To-Date
- 52.88 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- < 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Aug 18, 2028 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Aug 18, 2032 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Aug 18, 2036 |