Exhaust system and process equipment

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12230517
APP PUB NO 20220285177A1
SERIAL NO

17825577

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Abstract

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An exhaust structure includes a piping section, wherein the piping section has a first inner diameter in a central region of the piping section, the piping section has a second diameter in at least one of an inlet or an outlet, and the second diameter has a same value as the first inner diameter. The exhaust structure further includes a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gasses in the piping section.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsieh, Hsien-Chang Hsinchu, TW 5 12
Lin, Chun-Chih Hsinchu, TW 55 80
Shih, Tah-te Hsinchu, TW 11 27
Su, Yu-Jen Hsinchu, TW 19 72
Wu, Wen-Hsong Hsinchu, TW 4 0
Yang, Chune-Te Hsinchu, TW 4 6

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