Organoaminosilane precursors and methods for depositing films comprising same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12230496
APP PUB NO 20210407793A1
SERIAL NO

17469211

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Abstract

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Described herein are precursors and methods for forming silicon-containing films. In one aspect, the precursor comprises a compound represented by one of following Formulae A through E below:

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Patent Owner(s)

  • VERSUM MATERIALS US, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chandra, Haripin San Marcos, US 41 4532
Ho, Richard Anaheim, US 27 1732
Lei, Xinjian Vista, US 203 13409
MacDonald, Matthew R Laguna Niguel, US 43 1358
O'Neill, Mark Leonard Queen Creek, US 111 11126
Wang, Meiliang San Marcos, US 31 1761
Xiao, Manchao San Diego, US 139 13591

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