Plasma reactor having array of coaxial multiple pins and processing low temperature plasma at high efficiency

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United States of America

PATENT NO 12230481
APP PUB NO 20240006162A1
SERIAL NO

18167897

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Abstract

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A plasma reactor, configured to process low temperature plasma, includes: a rotating reactor, a fixed reactor, and a master tube. An end of the master tube is connected to two branched tubes, one of the two branched tubes is connected to the rotating reactor, and the other one of the two branched tubes is connected to the fixed reactor. When a flow rate of inlet gas is less than a threshold defined by a flow detector, all the gas enters the rotating reactor from one of the two branched tubes. When the flow rate of the inlet gas is greater than the threshold of the flow detector, a valve is configured to operate to allow a part of the inlet gas that exceeds the threshold to enter the fixed reactor from the other one of the two branched tubes.

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Patent Owner(s)

  • HANGZHOU CITY UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Deng, Zhaozhe Hangzhou, CN 2 1
Fu, Jiahong Hangzhou, CN 3 1
Liu, Xingliang Hangzhou, CN 7 13
Qiu, Qi Hangzhou, CN 21 459
Wang, Pengfei Hangzhou, CN 172 398

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