Detaching and installing device for gas distribution plate of etching machine, and etching machine
Number of patents in Portfolio can not be more than 2000
United States of America
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Feb 18, 2025
Grant Date -
May 5, 2022
app pub date -
Oct 22, 2021
filing date -
Oct 22, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
The present application provides a detaching and installing device for a gas distribution plate of an etching machine, and the etching machine, and relates to the field of semiconductor manufacturing technologies, aiming at addressing the problems that it is quite difficult to detach and install the gas distribution plate of the etching machine and that the gas distribution plate is highly likely to be polluted. The detaching and installing device for the gas distribution plate of the etching machine includes a gripping member, a connecting member and a fixing member, the fixing member is detachably connected to the gas distribution plate of the etching machine, and the gripping member and the fixing member are connected through the connecting member; the gripping member is provided thereon with a gripping portion for grip by a user hand.
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