Effective temperature calculation method for multi-charged particle beam writing region, multi-charged particle beam writing apparatus, multi-charged particle beam writing method, and recording medium recording program
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United States of America
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Feb 18, 2025
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Jul 15, 2024
filing date -
Jul 15, 2024
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Abstract
In an effective temperature calculation method for multi-charged particle beam writing region, at a plurality of observation times which are irradiation end times of a tracking cycle in a time domain in which a beam array region passes through a mesh region of interest, for each of the plurality of unit heat source regions around the mesh region of interest, a temperature rise amount given to the mesh region of interest is determined based on a total irradiation time of the unit heat source region, times since start of irradiation to the unit heat source region to the observation times, and a distance from the unit heat source region to the mesh region of interest, the temperature rise amount is accumulated, and accumulated values corresponding to the plurality of observation times are averaged to calculate an effective temperature of the mesh region of the interest.
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