MEMS relay
Number of patents in Portfolio can not be more than 2000
United States of America
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Feb 18, 2025
Grant Date -
Jul 13, 2023
app pub date -
Jan 9, 2023
filing date -
Jan 9, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
A MEMS relay. The MEMS relay includes: a movable switching element, on which a second switching surface is arranged in a first end section; a substrate having a first switching surface arranged thereon, which is designed to interact with the second switching surface; a switching electrode, to which an electrical switching voltage may be applied, the movable switching element being able to bring the second switching surface into contact with the first switching surface by way of an electrostatic force generated by the electrical switching voltage; at least one second compensation surface arranged in an end section of the movable switching element opposite the second switching surface; and a first compensation surface, which is designed to interact with the second compensation surface and is galvanically connected to the first switching surface via a cable.
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