Method for manufacturing a MEMS switch having an embedded metal contact

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12230457
APP PUB NO 20220328258A1
SERIAL NO

17715213

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Abstract

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A MEMS switch that includes a substrate with a first insulating layer and a silicon layer thereabove, a fixed portion and a movable switching portion being formed in the silicon layer.

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Patent Owner(s)

  • 502 ROBERT BOSCH GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lewis, Matthew Reutlingen, DE 44 585
Reinmuth, Jochen Reutlingen, DE 150 702
Schmollngruber, Peter Aidlingen, DE 35 116

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