Wafer bin map based root cause analysis

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12229945
APP PUB NO 20230377132A1
SERIAL NO

18365157

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Abstract

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A template for assigning the most probable root causes for wafer defects. The bin map data for a subject wafer can be compared with bin map data for prior wafers to find wafers with similar issues. A probability can be determined as to whether the same root cause should be applied to the subject wafer, and if so, the wafer can be labeled with that root cause accordingly.

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Patent Owner(s)

Patent OwnerAddress
PDF SOLUTIONS INC333 W SAN CARLOS ST STE 1000 SAN JOSE CA 95110

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burch, Richard McKinney, US 17 57
Cheong, Lin Lee San Jose, US 15 70
David, Jeffrey Drue San Jose, US 126 1680
Honda, Tomonori Santa Clara, US 17 54
Keleher, Michael Seattle, US 10 808
Zhu, Qing Rowlett, US 122 1035

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