Selection of measurement locations for patterning processes

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United States of America

PATENT NO 12228862
APP PUB NO 20230333481A1
SERIAL NO

18207732

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Abstract

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A process of selecting a measurement location, the process including: obtaining pattern data describing a pattern to be applied to substrates in a patterning process; obtaining a process characteristic measured during or following processing of a substrate, the process characteristic characterizing the processing of the substrate; determining a simulated result of the patterning process based on the pattern data and the process characteristic; and selecting a measurement location for the substrate based on the simulated result.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hunsche, Stefan Santa Clara, US 53 1042
Jochemsen, Marinus Sunnyvale, US 28 162
Tel, Wim Tjibbo Helmond, NL 78 537
Van, Der Laan Hans Veldhoven, NL 44 528

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