Reflective mask blank, reflective mask, and manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12228853
APP PUB NO 20240419063A1
SERIAL NO

18820061

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A reflective mask blank, which is a binary reflective mask blank, includes, in order: a substrate; a multilayer reflective film configured to reflect EUV light; and a pattern film. The pattern film has a laminated structure including a total of L layers each having a different refractive index where L is a natural number of 2 or more. When an absorption coefficient of an i-th layer in the pattern film from a side opposite to the substrate is defined as ki, a thickness of the i-th layer in the pattern film from the side opposite to the substrate is defined as di (nm), a total thickness of the pattern film is defined as d, an exposure wavelength is defined as λ (nm), and Pi is defined as 1−exp(−2π/λ*diki), the following formula (1) is satisfied.

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Patent Owner(s)

  • AGC INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okato, Takeshi Tokyo, JP 6 3

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