Broad ion beam (BIB) systems for more efficient processing of multiple samples

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United States of America

PATENT NO 12228484
APP PUB NO 20230375445A1
SERIAL NO

17748878

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Abstract

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Systems and methods for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime, are disclosed. An example method for operating a broad ion beam (BIB) polisher having improved uptime according to the present invention comprises causing a first BIB source to emit a first broad ion beam towards a sample positioned within an interior volume of the BIB polisher while the first BIB source is in emitting the first broad ion beam towards the sample, removing a second BIB source from the BIB polisher that is configured to emit a second broad ion beam towards the sample when in use.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 N E DAWSON CREEK DRIVE HILLSBORO OR 97124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hrouzek, Michal Brno, CZ 7 16
Neelisetty, Krishna Kanth Brno, CZ 6 5
Novak, Libor Brno, CZ 11 43
Wandrol, Petr Brno, CZ 4 3

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