Flow control system, method, and apparatus
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United States of America
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Feb 18, 2025
Grant Date -
Dec 24, 2020
app pub date -
Sep 8, 2020
filing date -
Sep 8, 2020
priority date (Note) -
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Abstract
In one embodiment, a method for delivering a gas at a predetermined rate includes providing a gas flow control apparatus comprising a gas flow path extending from a gas inlet to a gas outlet, a proportional valve coupled to the gas flow path, an on/off valve coupled to the gas flow path, a volume being defined between the proportional valve and the on/off valve, and a flow restrictor having a flow impedance located downstream of the proportional valve. The volume is pressurized with the gas to a target set point by opening the proportional valve while the on/off valve is in an off state. Finally, the on/off valve is moved to the on state, delivering gas to the gas outlet.
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