Sealing article comprising metal coating, method of making and method of using the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12227839
APP PUB NO 20240084447A1
SERIAL NO

18513448

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Abstract

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A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hong, Peng-Cheng Taichung, TW 6 13
Hsu, W L Hsin-Chu, TW 4 4
Hung, Chia-Chun Taichung, TW 47 145
Kao, Chung-Hao Hsin-Chu, TW 3 0
Lee, Chin-Szu Taoyuan, TW 61 106
Pu, Jun-Liang Hsin-Chu, TW 3 0
Wu, Cheng-Yi Taichung, TW 49 150

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