Method of manufacturing capacitive micromachined ultrasonic transducer (CMUT)

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12226799
APP PUB NO 20220274133A1
SERIAL NO

17630059

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Abstract

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A method of manufacturing a capacitive micromachined ultrasonic transducer (CMUT) includes the steps of: a) forming a first dielectric layer on a first substrate; b) forming a second dielectric layer on a second substrate; c) forming a cavity in the first or second dielectric layer; d) assembling the first and second substrates by direct bonding of the surface of the second dielectric layer opposite to the second substrate to the surface of the first dielectric layer opposite to the first substrate; e) removing the second substrate to only keep above the cavity a suspended membrane formed by the second dielectric layer; and f) forming an upper electrode on the surface of the membrane opposite to the first substrate.

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Patent Owner(s)

  • VERMON SA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gross, Dominique Tours, FR 17 114
Meynier, Cyril Tours, FR 10 10
Senegond, Nicolas Tours, FR 6 4

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