In-line monitoring of OLED layer thickness and dopant concentration

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12225808
APP PUB NO 20240130210A1
SERIAL NO

18395081

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Abstract

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An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Banappanavar, Gangadhar Durham, GB 7 5
Egan, Todd J Fremont, US 33 201
Kabra, Dinesh Mumbai, IN 10 33
Kwak, Byung Sung Portland, US 41 260
Tung, Yeishin San Jose, US 8 60
Visser, Robert Jan Menlo Park, US 131 2477
Zhao, Guoheng Palo Alto, US 112 2261

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