Bake devices for handling and uniform baking of substrates

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12225641
APP PUB NO 20210195695A1
SERIAL NO

17119377

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Abstract

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Embodiments of the present disclosure relate to bake apparatuses for handling and uniform baking of substrates and methods for the handling and the uniform baking of substrates. The bake apparatuses allow the substrates to be heated to a temperature greater than 50° C. without bowing of about 1 mm to about 2 mm from the edge of the substrates to the center of the substrates. The bake apparatuses heat the substrates uniformly or substantially uniformly to improve substrate quality.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cervera, Hiram Santa Clara, US 2 4
Godet, Ludovic Sunnyvale, US 327 3246
Xu, Yongan Santa Clara, US 107 428

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