Manufacturing method of a composite substrate of an acoustic wave resonator

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United States of America

PATENT NO 12224730
APP PUB NO 20220247375A1
SERIAL NO

17618690

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Abstract

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The present invention discloses a composite substrate for manufacturing an acoustic wave resonator and a Surface Acoustic Wave (SAW) resonator, and a manufacturing method thereof. The manufacturing method of the composite substrate includes: providing a base, wherein the base includes a first surface and a second surface that are opposite to each other; and a first groove sunken towards the second surface is formed on the first surface; and providing a piezoelectric plate, wherein the piezoelectric plate is matched with the first groove in shape, and a bottom of the first groove is integrated with the piezoelectric plate by bonding; and the composite substrate includes: a base, wherein the base includes a first surface and a second surface that are opposite to each other; and a first groove sunken towards the second surface is provided on the first surface; and a piezoelectric plate, wherein the piezoelectric plate is embedded into the first groove, and a top of the piezoelectric plate is higher than the first surface or flush with the first surface.

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Patent Owner(s)

  • NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Herb He Zhejiang, CN 76 343
Li, Wei Zhejiang, CN 2284 14552
Luo, Hailong Zhejiang, CN 34 36
Qi, Fei Zhejiang, CN 41 114

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