Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12224549
APP PUB NO 20230187896A1
SERIAL NO

18167611

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Importance

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Abstract

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A line narrowing module includes an enclosure, a prism which is disposed in an internal space of the enclosure and through which light passes, a mounter which is disposed in the internal space and on which the prism is mounted, a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and a light blocking member. The light blocking member is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.

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Patent Owner(s)

  • GIGAPHOTON INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furusato, Hiroshi Oyama, JP 7 18
Maekawa, Junichi Oyama, JP 13 135

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