Substrate processing system and method for controlling substrate processing system
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United States of America
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Feb 11, 2025
Grant Date -
Jul 21, 2022
app pub date -
May 25, 2020
filing date -
May 25, 2020
priority date (Note) -
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Abstract
A substrate processing system, which includes a transfer device configured to simultaneously transfer a plurality of substrates and suitably corrects positions of the substrate, and a method of controlling the substrate processing system are provided. The substrate processing system includes: a process chamber in which a plurality of substrates is processed; a vacuum transfer chamber connected to the process chamber; a transfer device provided in the vacuum transfer chamber and configured to simultaneously transfer a plurality of substrates; a module connected to the vacuum transfer chamber and having a plurality of stages on which substrates are placed; and a controller. The controller is configured to measure an amount of change of an arm of the transfer device that has transferred processed substrates, and to correct positions of the stages based on the amount of change of the arm of the transfer device.
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