Magnetic-field-assisted plasma coating system

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12224165
APP PUB NO 20230203641A1
SERIAL NO

18113703

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Abstract

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A magnetic-field-assisted plasma coating system and method are provided. In another aspect, a coating system employs a cathode with a linearly moveable magnetic field. A further aspect employs a workpiece as an anode within which is located an elongated cathode which internally coats a bore of the workpiece. Still another aspect of the present system and method employs an elongated and hollow cathode with at least one magnetic source therein. In yet another aspect, end caps or plates seal against one or more open ends of a workpiece bore to be coated, with a cathode inserted into the bore and a vacuum being created within the bore such that the workpiece itself defines at least a portion of a vacuum chamber.

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Patent Owner(s)

  • BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY; FRAUNHOFER USA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Becker, Michael East Lansing, US 203 3156
Fan, Qi Hua Okemos, US 17 62
Haubold, Lars East Lansing, US 6 5
Schuelke, Thomas Pinckney, US 23 184

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