Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool

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United States of America

PATENT NO 12224156
APP PUB NO 20210327686A1
SERIAL NO

17244824

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Plasma source assemblies, gas distribution assemblies including the plasma source assembly and methods of generating a plasma are described. The plasma source assemblies include a powered electrode with a ground electrode adjacent a first side and a dielectric adjacent a second side. A first microwave generator is electrically coupled to the first end of the powered electrode through a first feed and a second microwave generator is electrically coupled to the second end of the powered electrode through a second feed.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bera, Kallol Fremont, US 125 3879
Dzilno, Dmitry A Sunnyvale, US 41 108
Kudela, Jozef Morgan Hill, US 46 2483
Li, Xiaopu San Jose, US 14 7
Tanaka, Tsutomu Santa Clara, US 399 11273

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