Lithography method for positive tone development

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12222654
APP PUB NO 20210341844A1
SERIAL NO

17378507

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Abstract

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A method includes illuminating radiation to a resist layer over a substrate to pattern the resist layer. The patterned resist layer is developed by using a positive tone developer. The patterned resist layer is rinsed using a basic aqueous rinse solution. A pH value of the basic aqueous rinse solution is lower than a pH value of the developer, and a rinse temperature of rinsing the patterned resist layer is in a range of about 20° C. to about 40° C.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Ching-Yu Yilang County, TW 578 7902
Lin, Chin-Hsiang Hsinchu, TW 424 6439
Liu, Chen-Yu Kaohsiung, TW 124 1461
Weng, Ming-Hui New Taipei, TW 50 58
Wu, Cheng-Han Taichung, TW 111 309

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