Salt, acid generator, resist composition and method for producing resist pattern

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12222648
APP PUB NO 20220146931A1
SERIAL NO

17521141

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Abstract

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Disclosed are a salt represented by formula (I), an acid generator and a resist composition:

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Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka, JP 316 1995
Shimada, Masahiko Osaka, JP 81 454

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