Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask

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United States of America

PATENT NO 12222640
APP PUB NO 20240168370A1
SERIAL NO

18382269

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A reflective mask blank containing a substrate, a multilayer reflective film that reflects EUV light, and a phase shift film that shifts a phase of the EUV light, the substrate, the multilayer reflective film, and the phase shift film being arranged in this order. The phase shift film contains a compound containing Ru and Cr, an element ratio between Cr and Ru (Cr:Ru) in the phase shift film is 5:95 to 42:58, and a melting point MP1 of an oxide of the compound and a melting point MP2 of a fluoride or an oxyfluoride of the compound satisfy the following relation (1):

description='In-line Formulae' end='lead'0.625MP1+MP2≤1000  (1).description='In-line Formulae' end='tail'

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Patent Owner(s)

  • AGC INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akagi, Daijiro Tokyo, JP 24 20
Ishikawa, Ichiro Tokyo, JP 15 38
Iwaoka, Hiroaki Tokyo, JP 14 15
Taki, Shunya Tokyo, JP 8 4

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