Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes

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United States of America

PATENT NO 12222492
APP PUB NO 20220099960A1
SERIAL NO

17487166

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Abstract

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A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.

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Patent Owner(s)

  • STMICROELECTRONICS S.R.L.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boni, Nicolo' Albino, IT 32 18
Carminati, Roberto Piancogno, IT 67 148
Merli, Massimiliano Pavia, IT 28 41

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