Online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy

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United States of America

PATENT NO 12222283
APP PUB NO 20230243740A1
SERIAL NO

17885230

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Abstract

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Disclosed are an online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy. In the system, a laser device generates laser that excites the laser through fiber induced breakdown spectroscopy; a fiber coupler couples and injects the laser; a single fiber is connected to the fiber coupler to transmit the laser; one end of an LIBS probe is connected to the single fiber, and the other end of the LIBS probe extends into a vacuum arc-extinguishing chamber; the laser is induced by the LIBS probe to generate plasma, and the plasma is subjected to self-emission imaging and enters the fiber coupler via the LIBS probe; a dichroscope is arranged on the fiber coupler to separate the laser from the plasma; a processor is connected to a camera and a spectrometer.

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Patent Owner(s)

  • XI'AN JIAOTONG UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Minyuan Shaanxi, CN 1 0
Ke, Wei Shaanxi, CN 10 24
Liu, Dingxin Shaanxi, CN 7 1
Liu, Jiaqi Shaanxi, CN 25 26
Rong, Mingzhe Shaanxi, CN 31 37
Wang, Xiaohua Shaanxi, CN 63 187
Yang, Aijun Shaanxi, CN 12 2
Yuan, Huan Shaanxi, CN 12 9
Zhang, Feilong Shaanxi, CN 5 11

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