Systems and methods for measurement of misregistration and amelioration thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12222199
APP PUB NO 20220307824A1
SERIAL NO

17254253

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Abstract

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A system for use with a misregistration metrology tool (MMT), the system including a database including a plurality of process variation (PV) categories and a corresponding plurality of parameter sets and a process variation accommodation engine (PVAE) including a measurement site process variation category associator (MSPVCA) operative to associate a measurement site being measured by the MMT, at least partially based on an MMT output relating to the measurement site, with a measurement site process variation category (MSPVC), the MSPVC being one of the plurality of PV categories, a measurement site parameter set retriever (MSPSR) operative to retrieve a measurement site parameter set (MSPS) corresponding to the MSPVC and a measurement site parameter set communicator (MSPSC) operative to communicate the MSPS to the MMT.

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Patent Owner(s)

  • KLA CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Golotsvan, Anna Qiryat Tivon, IL 14 24
Levinski, Vladimir Migdal HaEmek, IL 106 1375
Manassen, Amnon Haifa, IL 128 1032
Negri, Daria Nesher, IL 36 316
Paskover, Yuri Binyamina, IL 38 141
Reddy, Nireekshan K Tel Aviv, IL 8 2
Rothman, Nachshon DN Oshrat, IL 3 1
Simon, Yossi Haifa, IL 11 15
Volkovich, Roie Hadera, IL 35 61

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