Semiconductor device and method of manufacturing semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12221339
APP PUB NO 20240190700A1
SERIAL NO

18436950

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Abstract

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In one example, an electronic device includes a semiconductor sensor device having a cavity extending partially inward from one surface to provide a diaphragm adjacent an opposite surface. A barrier is disposed adjacent to the one surface and extends across the cavity, the barrier has membrane with a barrier body and first barrier strands bounded by the barrier body to define first through-holes. The electronic device further comprises one or more of a protrusion pattern disposed adjacent to the barrier structure, which can include a plurality of protrusion portions separated by a plurality of recess portions; one or more conformal membrane layers disposed over the first barrier strands; or second barrier strands disposed on and at least partially overlapping the first barrier strands. The second barrier strands define second through-holes laterally offset from the first through-holes. Other examples and related methods are also disclosed herein.

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Patent Owner(s)

  • AMKOR TECHNOLOGY SINGAPORE HOLDING PTE LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alapati, Ramakanth Dublin, US 56 1433
Baloglu, Bora Oporto, PT 37 261
Cho, Hyun Incheon, KR 120 7164
Ryu, Kyung Han Incheon, KR 10 166
Yang, Ki Yeul Incheon, KR 13 2
Yun, Seok Hun Incheon, KR 4 1

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