Microelectromechanical resonator
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Feb 4, 2025
Grant Date -
Jan 2, 2025
app pub date -
Jan 15, 2024
filing date -
Jan 15, 2024
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date | Type | Sub-Type |
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International Classification(s)
- 2024 Application Filing Year
- H03H Class
- 599 Applications Filed
- 21 Patents Issued To-Date
- 3.51 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H03H Class
- 0 % this patent is cited more than
- < 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Aug 4, 2028 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Aug 4, 2032 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Aug 4, 2036 |