Method and device for producing uniform films on moving substrates and films produced in this way

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12217947
APP PUB NO 20160254127A1
SERIAL NO

15029536

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Abstract

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The invention relates to the deposition of optical precision films with high uniformity, precision, particle freedom and low absorption on the substrate. For this purpose, a method and a device are proposed. The approach is the use of target materials and also possibly of surfaces in the sputtering field. Particularly high uniformity and also particularly low residual absorption are achieved with these materials. The invention is suitable for the production of optical thin-film filters, as are used for example in laser material machining, laser components, optical sensors for measuring technology, or in medical diagnostics.

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Patent Owner(s)

  • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rademacher, Daniel Braunschweig, DE 3 34
Vergöhl, Michael Cremlingen, DE 12 27
Zickenrott, Tobias Braunschweig, DE 4 5

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