High power cable for heated components in RF environment

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12217944
APP PUB NO 20240105429A1
SERIAL NO

18526215

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Importance

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Abstract

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A substrate support includes an edge ring, a heater element arranged within the edge ring, a ceramic layer, at least one heating element arranged within the ceramic layer, and a cable configured to provide power from a power source to the heater element and the at least one heating element. The cable includes a first plurality of wires connected to the heater element, a second plurality of wires connected to the at least one heating element, a filter module, and an isolation device connected only to the first plurality of wires between the filter module and the heater element. The first and second pluralities of wires are twisted together within the filter module. The isolation device is configured to compensate for a resonance frequency generated during operation of the heater element and the at least one heating element.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Finnegan, Kenneth Walter Sunnyvale, US 2 2
Jafarian-Tehrani, Seyed Jafar Fremont, US 29 548
O'Brien, Sean San Jose, US 75 912
Tong, Benson Q San Jose, US 3 2

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