Method and program for predicting bending in optical products
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United States of America
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Feb 4, 2025
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Nov 4, 2021
app pub date -
Jul 12, 2021
filing date -
Jul 12, 2021
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Abstract
In the optical product bending prediction method according to the present invention, bending δ of a substrate having a film is predicted by a computer performing calculation (steps S11 to S13) of the following Expressions (A1), (B1), etc., in which a and Td are set as fitting parameters and have been optimized in each coating condition using a plurality of samples. Here, σint is intrinsic stress, Ef is a Young's modulus of a multilayer film, vf is a Poisson's ratio of the multilayer film, αf is a linear coefficient expansion of the multilayer film, αs is a linear coefficient expansion of the substrate, T is a room temperature, d is a film thickness, b is a substrate thickness, l is a radius of the substrate, Es is a Young's modulus of the substrate, and vs is a Poisson's ratio of the substrate.
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