Air-spaced encapsulated dielectric nanopillars for flat optical devices

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United States of America

PATENT NO 12216243
APP PUB NO 20200400990A1
SERIAL NO

16905703

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Abstract

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Embodiments described herein relate to flat optical devices and methods of forming flat optical devices. One embodiment includes a substrate having a first arrangement of a first plurality of pillars formed thereon. The first arrangement of the first plurality of pillars includes pillars having a height h and a lateral distance d, and a gap g corresponding to a distance between adjacent pillars of the first plurality of pillars. An aspect ratio of the gap g to the height h is between about 1:1 and about 1:20. A first encapsulation layer is disposed over the first arrangement of the first plurality of pillars. The first encapsulation layer has a refractive index of about 1.0 to about 1.5. The first encapsulation layer, the substrate, and each of the pillars of the first arrangement define a first space therebetween. The first space has a refractive index of about 1.0 to about 1.5.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chakraborty, Tapash Maharashtra, IN 19 61
Deepak, Nitin Mumbai, IN 17 26
Godet, Ludovic Sunnyvale, US 327 3246
Goradia, Prerna Sonthalia Mumbai, IN 34 1008
Roy, Tapashree Bangalore, IN 19 63
Sen, Srobona Mumbai, IN 6 3
Visser, Robert Jan Menlo Park, US 131 2477

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