Contactless optical probing of edge-coupled photonic ICs

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12216158
APP PUB NO 20220163583A1
SERIAL NO

17102891

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Abstract

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Systems and methods for testing a photonic IC (PIC) with an optical probe having an out-of-plane edge coupler to convey test signals between the out-of-plane probe and an edge coupled photonic waveguide within a plane of the PIC. To accommodate dimensions of the optical probe, a test trench may be fabricated in the PIC near an edge coupler of the waveguide. The optical probe may be displaced along one or more axes relative to a prober to position a free end of the prober within the test trench and to align the probe's out-of-plane edge coupler with an edge coupler of a PIC waveguide. Accordingly, a PIC may be probed at the wafer-level, without first dicing a wafer into PIC chips or bars. The optical probe may be physically coupled to a prober through a contact sensor to detect and/or avoid physical contact between probe and PIC.

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Patent Owner(s)

  • INTEL CORP.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Frish, Harel Albuquerque, US 47 182
Hicks, Jeremy Santa Clara, US 3 0
Mahalingam, Hari San Jose, US 24 15
Seibert, Christopher Santa Clara, US 2 0
Snow, Eric Berkeley, US 1 0

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