Station and method for measuring airborne molecular contamination
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United States of America
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Feb 4, 2025
Grant Date -
Jul 13, 2023
app pub date -
Mar 26, 2021
filing date -
Mar 26, 2021
priority date (Note) -
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Abstract
A measurement station for measuring airborne molecular contamination includes at least one gas analyser, at least two controllable isolation valves connected in parallel to the input of the at least one gas analyser, a conditioning pump, at least two calibrated orifices connected in parallel to the input of the conditioning pump, at least one distributor to connect each controllable isolation valve with, on one side, a sampling line and, on the other side, a calibrated orifice, and a control unit linked to the controllable isolation valves. The control unit commands the opening or the closing of the controllable isolation valves in order to be able to connect the at least one gas analyser with at least one sampling line.
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