Method for increasing the surface roughness of a metal layer

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United States of America

PATENT NO 12215430
APP PUB NO 20220173163A1
SERIAL NO

17535147

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Abstract

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A method for increasing the surface roughness of a layer based on a metal having a catalytic power, includes fixing fluorine or chlorine on the surface of the metal based layer, by exposing the metal based layer to a plasma formed from a reactive gas containing fluorine or chlorine; exposing the surface of the metal based layer to a humid environment to produce an acid, by reaction of hydrogen from the humid environment with the fluorine or the chlorine fixed on the surface of the metal based layer, the acid reacting with the metal to form residues, the whole of the residues forming a pattern on the surface of the metal based layer, and etching the metal based layer through the residues, so as to transfer the pattern into the metal based layer.

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Patent Owner(s)

  • COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grenouillet, Laurent Grenoble, FR 64 304
Pollet, Olivier Grenoble, FR 5 19
Posseme, Nicolas Grenoble, FR 98 414

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