MEMS device with damping fluid vertically sandwiched between moving and non-moving structures

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12215020
APP PUB NO 20240174509A1
SERIAL NO

18436373

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Abstract

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A microelectromechanical system (MEMS) device includes a substrate, a suspended element and a damping structure connected to the suspended element and one or more fluid confinement structures. The suspended element is connected to a fixed part of the substrate by one or more flexures configured to permit movement of the suspended element relative to a fixed part of the substrate. The damping structure extends into a gap between the suspended element and the fixed part of the substrate. The damping structure includes one or more winglets that protrude over a recessed portion of the fixed part of the substrate. The fluid confinement structures are formed by the recessed portion of the fixed substrate and are configured to permit movement of the damping structure over the recessed portion of the substrate and confine a viscoelastic fluid to the limited portion of the gap underneath the winglets.

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Patent Owner(s)

  • MIRRORCLE TECHNOLOGIES, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kindt, Johannes Weimar, DE 15 77
Milanovic, Veljko Richmond, US 25 256
Richter, Stefan Jena, DE 91 928

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