Electrostatic device, electrostatic device intermediate body and production method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12215019
APP PUB NO 20220324697A1
SERIAL NO

17615978

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An electrostatic device includes: a fixed portion, a moveable portion, and an elastically-supporting portion that are formed in a same substrate; and a first glass package and a second glass package that are anodically bonded to each other on one and the other of front and back surfaces of the substrate with the fixed portion and the elastically-supporting portion separated from each other, the second glass package forms a sealed space in which the moveable portion is arranged between the first and second glass packages, an electret is formed at least partially in the fixed portion and the moveable portion, and a first electrode connected to the fixed portion and exposed on an outer surface of the second glass package and a second electrode connected to the elastically-supporting portion and exposed on the outer surface of the second glass package are formed in the second glass package.

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First Claim

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Patent Owner(s)

  • THE UNIVERSITY OF TOKYO; SAGINOMIYA SEISAKUSHO INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Honma, Hiroaki Tokyo, JP 16 51
Mitsuya, Hiroyuki Sayama, JP 23 94
Toshiyoshi, Hiroshi Tokyo, JP 29 169

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