Method for manufacturing vibration element

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12213381
APP PUB NO 20220246835A1
SERIAL NO

17587012

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for manufacturing a vibration element that includes a base portion, a first vibration arm and a second vibration arm that extend from the base portion along a first direction and are arranged along a second direction intersecting the first direction, and bottomed grooves on both main surfaces of the first vibration arm and both main surfaces of the second vibration arm includes: a preparing step of preparing a crystal substrate; a protective film forming step of forming a protective film on the crystal substrate except for groove regions that are regions in which the grooves are formed; and a dry etching step of dry etching the crystal substrate through the protective film to form the grooves. The grooves provided in at least one of the first vibration arm and the second vibration arm include a first groove and a second groove arranged along the second direction.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATION1-6 SHINJUKU 4-CHOME SHINJUKU-KU TOKYO 1608801 ?1608801

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Takuro Minowa, JP 17 7
Nishizawa, Ryuta Nagano, JP 103 299
Sakata, Hiyori Minowa, JP 15 0
Shiraishi, Shigeru Ina, JP 23 3
Yamaguchi, Keiichi Ina, JP 131 865

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