Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12212306
APP PUB NO 20220094336A1
SERIAL NO

17542295

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Abstract

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Methods of fabricating filter devices are disclosed. A back surface of a piezoelectric plate having a first thickness is attached to a substrate. The front surface of the piezoelectric plate is selectively etched to thin a portion of the piezoelectric plate from the first thickness to a second thickness less than the first thickness. Cavities are formed in the substrate such that portions of the piezoelectric plate form a plurality of diaphragms spanning respective cavities. A conductor pattern is formed on the front surface. The conductor pattern includes a first interdigital transducer (IDT) with interleaved fingers on a first diaphragm having the first thickness and a second IDT with interleaved fingers on a second diaphragm having the second thickness.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDKYOTO JAPAN KYOTO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cardona, Albert Santa Barbara, US 24 14
Hammond, Robert B Santa Barbara, US 72 1997
Kay, Andrew Provo, US 81 835
Kelly, Dylan San Diego, US 8 125
O'Brien, Chris San Diego, US 35 245
Turner, Patrick San Bruno, US 141 3419
Yantchev, Ventsislav Sofia, BG 138 3509

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