high Q acoustic wave resonator

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12212305
APP PUB NO 20230396234A1
SERIAL NO

17804916

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Importance

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Abstract

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An acoustic wave resonator has a first conductive layer, piezoelectrical material formed over the first conductive layer, and second conductive layer formed over the piezoelectric material. An alignment of the first conductive layer, piezoelectric material and second conductive area defines an active region of the resonator and the active region includes a core area and a plurality of fractals extending from or recessed into the core area. The fractals maximize a perimeter-to-area ratio of the active region of the resonator. The fractals increase electromechanical coupling and a quality factor of the resonator. The fractals can have a star shape, rounded shape, asymmetric shape, or other shape that optimizes the perimeter-to-area ratio of the active region to maximize performance of the resonator. A frame can be disposed over or within the piezoelectric material. The frame is raised above the second conductive layer or recessed below the second conductive layer.

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Patent Owner(s)

Patent OwnerAddress
MACOM TECHNOLOGY SOLUTIONS HOLDINGS INC100 CHELMSFORD STREET LOWELL MA 01851

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carlson, Douglas J Hopkinton, US 2 14
Long, Rathnait North Andover, US 5 0
Patel, Mihir S Hopkinton, US 7 20
Winslow, Thomas A Salem, US 9 73

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