MEMS resonator with high quality factor and its use

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12212300
APP PUB NO 20230412140A1
SERIAL NO

18251020

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Abstract

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A MEMS (microelectromechanical system) resonator with a material layer of single-crystalline silicon, at least one layer made of material with low thermal diffusivity to reduce thermoelastic dissipations in the MEMS resonator, a layer of piezoelectric material, and a layer made of electrically conducting material. The layer with low thermal diffusivity is between the single-crystalline silicon layer and the piezoelectric layer, or between the piezoelectric layer and the electrically conducting layer. The use of a material layer of low thermal diffusivity.

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Patent Owner(s)

Patent OwnerAddress
KYOCERA TECHNOLOGIES OYTIETOTIE 3 ESPOO 02150

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jaakkola, Antti Espoo, FI 26 272
Koppinen, Panu Espoo, FI 9 3
Oja, Aarne Espoo, FI 23 231

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