Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions

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United States of America

PATENT NO 12212298
APP PUB NO 20240039500A1
SERIAL NO

17877206

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Abstract

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A micro-mechanical resonator die includes: micro-mechanical resonator die layers; a cavity formed in at least one of the micro-mechanical resonator die layers; and a micro-mechanical resonator suspended in the cavity. The micro-mechanical resonator includes: a base; a first resonator portion extending from the base along a first plane; and a second resonator portion extending from the base along a second plane. The first resonator portion is configured to operate in an out-of-plane flexural mode that displaces at least part of the first resonator portion out of the first plane. The second resonator portion is configured to operate in an out-of-plane flexural mode that displaces at least part of the second resonator portion out of the second plane and out-of-phase relative to the first resonator portion.

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Patent Owner(s)

  • AGILENT TECHNOLOGIES TEXAS INSTRUMENTS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bahr, Bichoy Allen, US 60 97
Mansoorzare, Hakhamanesh Orlando, US 8 2
Segovia-Fernandez, Jeronimo San Jose, US 11 1
Yen, Ting-Ta San Jose, US 49 143

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