Stage, film-forming apparatus, and film-processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12211710
APP PUB NO 20210217638A1
SERIAL NO

17219316

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

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Patent Owner(s)

Patent OwnerAddress
NHK SPRING CO LTDKANAGAWA KANAGAWA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aikawa, Naoya Yokohama, JP 12 13
Hanamachi, Toshihiko Yokohama, JP 26 930
Sekiya, Kenji Yokohama, JP 8 15
Takanashi, Masaya Yokohama, JP 5 6
Tatsumi, Arata Yokohama, JP 9 18

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